Operating Experience with a New Reactive Ion Plating Unit for TiN Coating

During 1986, a physical vapor deposition titanium nitride reactive ion plating unit, the first of its kind shipped to the U.S., was put in to operation.  It was designed for electron beam evaporation of titanium, utilizing triode plasma configuration and hot filament ionization assist.  This article outlines some start-up and learning problems, and describes present equipment, Vacuum Furnace Systems Corp. modifications, and helpful processing tips.

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